Field-emission gun Scanning electron microscope (FEG-SEM) that allows a wide range of specimens to be examined, including uncoated samples.
- Acceleration Voltage: 1 ~ 30 kV
- The analysis facilities include EDX (Oxford Inca system), WDS and cathodoluminescence (Gatan MiniCL, visible range, 185 nm ‐ 850 nm)
- Surface and morphology examination
- Chemical analysis of bulk samples.
- Cathodoluminescence analysis